<?xml version="1.0"?>
<rdf:RDF xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:owl="http://www.w3.org/2002/07/owl#" xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:dcat="http://www.w3.org/ns/dcat#" xmlns:dct="http://purl.org/dc/terms/" xmlns:adms="http://www.w3.org/ns/adms#" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:time="http://www.w3.org/2006/time#" xmlns:dcterms="http://purl.org/dc/terms/" xmlns:vcard="http://www.w3.org/2006/vcard/ns#"><dcat:Dataset rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas"><dct:title>Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas</dct:title><dct:description><![CDATA[<p>The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset  provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.</p>
]]></dct:description><dcat:keyword>benchmark data</dcat:keyword><dcat:keyword>plasma modelling/simulation</dcat:keyword><dcat:theme>Plasma Chemical Processes</dcat:theme><dct:identifier>60dbcdd4-8be4-4f41-896c-e725bdb37fe2</dct:identifier><dct:issued>2019-06-14T13:41:07+02:00</dct:issued><dct:modified>2021-06-11T12:36:53+02:00</dct:modified><dct:language>en</dct:language><dct:publisher>INP</dct:publisher><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/ceb3f641-fa38"/><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/0276f0b1-b839"/><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/5d2db3a0-78ed"/><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/70bb6a33-a2b3"/><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/45a84df9-3f12"/><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/b7e0877d-031e"/><dcat:distribution rdf:resource="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/3c428028-5fdc"/></dcat:Dataset><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/ceb3f641-fa38"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (argon, 20 Pa)</dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in argon at a gas pressure of 20 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:25:21+02:00</dct:issued><dct:modified>2020-02-14T19:37:42+01:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_Ar20Pa_0.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/ceb3f641-fa38</foaf:page></dcat:Distribution><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/0276f0b1-b839"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (argon, 40 Pa)</dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in argon at a gas pressure of 40 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:36:45+02:00</dct:issued><dct:modified>2020-02-14T19:37:42+01:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_Ar40Pa.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/0276f0b1-b839</foaf:page></dcat:Distribution><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/5d2db3a0-78ed"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (argon, 80 Pa)</dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in argon at a gas pressure of 80 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:37:56+02:00</dct:issued><dct:modified>2021-06-11T12:36:53+02:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_Ar80Pa.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/5d2db3a0-78ed</foaf:page></dcat:Distribution><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/70bb6a33-a2b3"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (helium, 10 Pa)</dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in helium at a gas pressure of 10 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:39:38+02:00</dct:issued><dct:modified>2020-02-14T19:37:42+01:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_He10Pa.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/70bb6a33-a2b3</foaf:page></dcat:Distribution><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/45a84df9-3f12"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (helium, 20 Pa) </dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in helium at a gas pressure of 20 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:40:50+02:00</dct:issued><dct:modified>2020-02-14T19:37:42+01:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_He20Pa.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/45a84df9-3f12</foaf:page></dcat:Distribution><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/b7e0877d-031e"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (helium, 40 Pa)</dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in helium at a gas pressure of 40 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:42:51+02:00</dct:issued><dct:modified>2020-02-14T19:37:42+01:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_He40Pa.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/b7e0877d-031e</foaf:page></dcat:Distribution><dcat:Distribution rdf:about="https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/3c428028-5fdc"><dct:title>Benchmark data for CCRF discharge plasmas - time averaged ion density (helium, 80 Pa)</dct:title><dct:description><![CDATA[<p>This data table includes the time-averaged ion density profiles between the electrodes as obtained from the two different PIC-MCC simulation codes (PIC-ITAP and PIC-INP), and the two different fluid models (DDAn and DDA53) in helium at a gas pressure of 80 Pa.</p>
]]></dct:description><dct:issued>2019-06-18T15:44:02+02:00</dct:issued><dct:modified>2020-02-14T19:37:42+01:00</dct:modified><dcat:accessURL rdf:resource=""/><dcat:downloadURL rdf:resource="https://inptdat.de/system/files/node72_data-table_Ni_He80Pa.csv"/><dcat:mediaType>text/csv</dcat:mediaType><dct:format>csv</dct:format><dcat:byteSize>7235</dcat:byteSize><foaf:page>https://inptdat.de/dataset/benchmark-data-fluid-modelling-low-pressure-ccrf-discharge-plasmas/resource/3c428028-5fdc</foaf:page></dcat:Distribution><foaf:Agent rdf:about="https://inptdat.de/publisher/n0"><foaf:name>DKAN</foaf:name><foaf:homepage>https://inptdat.de</foaf:homepage><dct:type rdf:resource="http://purl.org/adms/publishertype/NonProfitOrganisation"/></foaf:Agent></rdf:RDF>
