Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experimentsThe plasma parameters of a large-area dielectric barrier discharge (DBD) in argon-HMDSO mixtures containing up to about 1600 ppm of the monomer are investigated by means of numerical modelling. A time-dependent,
spatially one-dimensional fluid model is applied, taking into account the spatial variation of the discharge plasma between plane-parallel dielectrics covering the electrodes. The dataset contains values of power dissipated in the DBD as well as the space- and period-averaged density and mean energy of the electrons as a function of HMDSO admixture.

]]>DBDHMDSOplasma modelling/simulationplasma parametersplasma polymerizationMaterials / Surfaces, Plasma Chemical Processes8cb15716-7479-4f8b-8991-95fbcc9701a52019-08-27T10:54:33+02:002020-04-01T22:40:48+02:00enINPPlasma parameters in an Ar-HMDSO DBD - tabulated dataData table including the HMDSO admixture x [ppm] and the plasma parameters dissipated power in the DBD [W], electron density [10^{10}cm^{-3}] and mean electron energy [eV]

]]>2019-08-27T10:56:31+02:002020-02-14T19:44:57+01:00text/csvcsv585https://inptdat.de/dataset/plasma-parameters-ar-hmdso-dbd-atmospheric-pressure-plasma-polymerization-experiments-0DKANhttps://inptdat.de