Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densitiesThis data set contains the data shown in the corresponding publication in Applied Physics Letters (https://doi.org/10.1063/5.0160303). This publication presents a benchmark of THz absorption spectroscopy against a more established method. Atomic oxygen densities were measured with THz absorption spectroscopy and compared to those obtained from picosecond (ps) two-photon absorption laser induced fluorescence (TALIF) measurements on the same capacitively coupled radio frequency oxygen discharge. Similar changes in the atomic oxygen density were observed with both diagnostics when varying the applied power (20–100 W) and the gas pressure (0.7–1.3 mbar). Quantitatively, the results are in good agreement as well, especially when considering the total margin of error of the two diagnostics. This shows that THz absorption spectroscopy is an accurate technique that can be reliably used for real-world applications to determine atomic oxygen densities in plasmas.

]]>absorption spectroscopylaser induced fluorescenceTHz spectroscopyPlasma Chemical Processesd07d05a4-bb0c-41d7-a2af-5c20e949b98e2023-08-23T10:02:16+02:002023-08-23T10:04:00+02:00enINP, PDI, LSPMValidation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities - Figure 2aTime-resolved 3p 3PJ -> 3s 3S1 TALIF signal for a laser wavelength of 225.555 nm, measured in a CCRF O2 discharge for a gas pressure of 1.3 mbar and an applied RF power of 30 W.

]]>2023-08-23T01:22:20+02:002023-08-23T10:02:17+02:00text/csvcsv35866https://inptdat.de/dataset/validation-thz-absorption-spectroscopy-comparison-ps-talif-measurements-atomic-oxygen-0Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities - Figure 2bSpectral profile of the time-integrated TALIF signal, measured in a CCRF O2 discharge for a gas pressure of 1.3 mbar and an applied RF power of 30 W.

]]>2023-08-23T01:23:51+02:002023-08-23T10:02:17+02:00text/csvcsv27102https://inptdat.de/dataset/validation-thz-absorption-spectroscopy-comparison-ps-talif-measurements-atomic-oxygen-1Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities - Figure 3Gaussian-shaped spectral absorption profile of the 3P1 <- 3P2 fine structure transition of ground-state atomic oxygen, measured in a CCRF O2 discharge for a gas pressure of 1.3 mbar and an applied RF power of 30 W.

]]>2023-08-23T01:30:26+02:002023-08-23T10:02:17+02:00text/csvcsv3152247https://inptdat.de/dataset/validation-thz-absorption-spectroscopy-comparison-ps-talif-measurements-atomic-oxygen-2Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities - Figure 4Comparison between absolute atomic oxygen densities obtained from THz absorption spectroscopy and ps-TALIF measurements on the same CCRF O2 discharge for a variation of the applied RF power and the gas pressure. All data points represent the average of 5 single measurements; the vertical bars indicate the standard deviation. Systematic errors are approximately 25% for THz absorption spectroscopy and 60% for TALIF.

]]>2023-08-23T01:33:36+02:002023-08-23T10:02:17+02:00text/csvcsv1890https://inptdat.de/dataset/validation-thz-absorption-spectroscopy-comparison-ps-talif-measurements-atomic-oxygen-3DKANhttps://inptdat.de