AEPT
Ruhr University Bochum
Chair of Applied Electrodynamics and Plasma Technology AEPT
44780 Bochum
GERMANY
Ruhr University Bochum
Chair of Applied Electrodynamics and Plasma Technology AEPT
44780 Bochum
GERMANY
Plasma Physics Research
ASML Veldhoven
5504, DR, Veldhoven
THE NETHERLANDS
Centrum Wiskunde & Informatica (CWI)
Science Park 123
1098 XG Amsterdam
NETHERLANDS
Department of Power Electrical and Electronic Engineering
Faculty of Electrical Engineering and Communication
Research Unit of Ionized and Reactives Media Studies (EMIR)
National School of Engineering of Monastir
Fraunhofer Institute for Electronic Nano Systems ENAS
Technologie-Campus 3
09126 Chemnitz
GERMANY
Leibniz Institute for Plasma Science and Technology
Felix-Hausdorff-Str. 2
17489 Greifswald
GERMANY
Technische Universität Bergakademie Freiberg
Institute of Materials Engineering
Gustav-Zeuner-Straße 5
Technische Universität Braunschweig
Institute for Surface Technology
Bienroder Weg 54E
Institute of Physics Belgrade
University of Belgrade
Pregrevica 118
Belgrade
SERBIA
Sensirion AG
c/o IRsweep
Laubisruetistrasse 44
8712 Staefa
SWITZERLAND