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HelixJet

INP

    The HelixJet is a capacitively coupled radio-frequency (RF) plasma source operating at atmospheric pressure. The RF power is applied to two double helix electrodes. The electrodes are placed outside a quartz tube fed by the working gas. The...

    AURA-WAVE (Sairem)

    INP

      AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source. It has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure due to...