Image

Drawing and photo of the Venturi-DBD setup

Properties

Power: 1-30 W
Frequency: 7-133 kHz and 1-2 MHz (operation as CCP system)
Gases: air, humidified air (VVDBD), argon, neon (other gases and mixtures on request)
Pressure: 100-1000 mbar

Technology Readiness Level: 

Description

The gas pressure is an effective parameter to control plasma-chemical reactions, but its adjustment often requires substantial effort. In the Venturi-DBD (VDBD), the pressure can be set to any value between 100 mbar and 1000 mbar reliably and reproducibly. Using a Venturi pump for vacuum generation ensures that the system is affordable and almost maintenance-free. With air as process gas, the output gas composition can seamlessly be adjusted from a strongly ozone-dominated regime to a nitrogen oxides-only-regime including nitric oxide. Moreover, an extension to a Venturi-Vapor-DBD (VVDBD) allows treating humidified process gases for an even greater plasma-chemical flexibility.

The system is available in different implementations adapted to the requirements of a variety of laboratory applications and experiments. It has been investigated in DFG research project 368502453.

Publications

Influence of surface parameters on dielectric-barrier discharges in argon at subatmospheric pressure
M. Stankov, M. M. Becker, R. Bansemer, K. D. Weltmann, and D. Loffhagen, Plasma Sources Sci. Technol. 29 (2020) 125009

Computer assisted development and optimization of a variable dielectric barrier discharge
R. Bansemer, University of Rostock (2020)

Spectroscopic investigation of a neon-operated DBD at atmospheric and intermediate pressure
R. Bansemer, L. V. Scholten, J. Winter, and K.-D. Weltmann, Plasma Res. Express 2 (2020) 035011

On the Ar(1s5) density distribution in a flow-driven DBD at intermediate pressure
R. Bansemer, J. Winter, A. Schmidt-Bleker, and K.-D. Weltmann, Plasma Sources Sci. Technol. 29 (2020) 035026

Monitoring of a dielectric barrier discharge-based process using the gas gap voltage
R. Bansemer, A. Schmidt-Bleker, U. van Rienen, and K.-D. Weltmann, Plasma Sources Sci. Technol. 28 (2019) 025002

Investigation and control of the O₃- to NO-transition in a novel sub-atmospheric pressure dielectric barrier discharge
R. Bansemer, A. Schmidt-Bleker, U. van Rienen, and K.-D. Weltmann, Plasma Sources Sci. Technol. 26 (2017) 065005

Group

INP

Leibniz Institute for Plasma Science and Technology
Felix-Hausdorff-Str. 2
17489 Greifswald
GERMANY

https://www.inp-greifswald.de/en/
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The Leibniz Institute for Plasma Science and Technology (INP) is the largest non-university institute in the field of low temperature plasmas, their basics and technical applications in Europe. The institute carries out research and development from idea to prototype. The topics focus on the needs of the market. At present, plasmas for materials and energy as well as for environment and health are the focus of interest.

Contact

For further information and/or interest in collaborations please contact:

Dr. Robert Bansemer
Plasma Sources

Tel.: +49 3834 554 3976
Fax: +49 3834 554 301

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