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Plasma parameters in an Ar-HMDSO DBD - tabulated data

Data table including the HMDSO admixture x [ppm] and the plasma parameters dissipated power in the DBD [W], electron density [10^{10}cm^{-3}] and mean electron energy [eV]

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Additional Information

FieldValue
mimetypetext/csv
filesize585 bytes
resource typefile upload
timestampAug 27, 2019
Resource filetype csv
Resource datatype data table
Resource range Ar-HMDSO mixture at 1 atm including 20 to 1600 ppm HMDSO
Resource quality verified