The time-dependent, spatially one-dimensional fluid-Poisson model includes particle balance equations for the densities of electrons, relevant neutral particles and ions, the electron energy balance equation to determine the mean electron energy, the Poisson equation to calculate the electric potential and field, as well as a balance equation for the surface charge density to consider the accumulation of charge carriers on the dielectric surfaces. Details about the basic equations, the reaction kinetics model, the transport properties and rate coefficients, the boundary conditions and the solution method are reported in Loffhagen et al. (https://doi.org/10.1002/ctpp.201700060).