AC

Non-thermal atmospheric pressure plasma jet (ntAPPJ)

Materials / Surfaces

The non-thermal atmospheric pressure plasma jet (ntAPPJ) is composed of a quartz capillary with an inner diameter of 4 mm and an outer diameter of 6 mm. The plasma jet operates at a high frequency of 27.12 MHz in pure noble gases (helium, neon, argon, krypton) at flow rates between 0.1 and 2 slm. Small molecular gas admixtures or organic vapors can be added to the carrier gas. Two outer ring electrodes (width 5 mm, distance 5 mm) are adjusted concentrically with the capillary axis.

HelixJet

Materials / Surfaces

The HelixJet is a capacitively coupled radio-frequency (RF) plasma source operating at atmospheric pressure. The RF power is applied to two double helix electrodes. The electrodes are placed outside a quartz tube fed by the working gas. The HelixJet has unique features highly relevant for practical applications. The innovative double helix electrode design enables extremely stable and homogeneous plasma conditions at low gas flow rates. This plays a crucial role for the quality and reproducibility of several applications, e.g.

Miniaturized Noble Gas Plasma Jet

Plasma Medicine

The Miniaturized Noble Gas Plasma Jet has originally been designed to be inserted into the working channel of a conventional endoscope. It has a tube-like character, is flexible, very thin and generates a biologically active jet plasma at the gas outlet. The device consists of an inner plastic tube, a ceramic nozzle, an outer plastic tube and a metal wire. The inner plastic tube is plugged upon the thin end of the ceramic nozzle.

Ar metastable densities (³P₂) in the effluent of a filamentary atmospheric pressure plasma jet with humidified feed gas - dataset

The Ar(³P₂) metastable density in the effluent of the cold atmospheric pressure plasma jet kINPen-sci was investigated as a function of the feed gas humidity, the gas curtain composition, and the distance from the nozzle by means of laser atomic absorption spectroscopy. The data set comprises the axial distributions of the Ar metastables as a function of these parameters.

Plasma Chemical Processes

Influence of surface parameters on dielectric-barrier discharges in argon at subatmospheric pressure - dataset

The provided data describe the discharge current in DBD obtained by fluid modelling using different values of for the secondary electron emission coefficient γ and and the relative permittivity of the dielectric barrier εr in comparison with the measured current at a pressure of 100 mbar and an applied voltage amplitude of 1.8 kV. Furthermore, the dissipated power obtained by model calculations for different values of γ and εr together with the measured power in dependence on the pressure is given.

Plasma Chemical Processes
Plasma Medicine

Electrical characteristics of atmospheric-pressure DBD in argon with small admixtures of TMS - measured and calculated data

A time-dependent, spatially one-dimensional fluid-Poisson model has been applied to analyse the impact of small amounts of tetramethylsilane (TMS) on the discharge characteristics of an atmospheric-pressure dielectric barrier discharge (DBD) in argon. Based on an established argon kinetics, it includes a reaction kinetics for TMS, which has been validated by measurements of the ignition voltage at the frequency f = 86.2 kHz for TMS amounts of up to 200 ppm.

Materials / Surfaces
Plasma Chemical Processes

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

Materials / Surfaces
Plasma Chemical Processes

Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments

The plasma parameters of a large-area dielectric barrier discharge (DBD) in argon-HMDSO mixtures containing up to about 1600 ppm of the monomer are investigated by means of numerical modelling. A time-dependent,
spatially one-dimensional fluid model is applied, taking into account the spatial variation of the discharge plasma between plane-parallel dielectrics covering the electrodes. The dataset contains values of power dissipated in the DBD as well as the space- and period-averaged density and mean energy of the electrons as a function of HMDSO admixture.

Materials / Surfaces
Plasma Chemical Processes