non-thermal

The provided data describe the discharge current in DBD obtained by fluid modelling using different values of for the secondary electron emission coefficient γ and and the relative permittivity of the dielectric barrier εr in comparison with the measured current at a pressure of 100 mbar and an applied voltage amplitude of 1.8 kV. Furthermore, the dissipated power obtained by model calculations for different values of γ and εr together with the measured power in dependence on the pressure is given.

The data set comprises the spatial distributions of H and O atoms in the cold atmospheric pressure plasma jet kINPen-sci. The data was obtained by means of picosecond two-photon absorption laser induced fluorescence spectroscopy (ps-TALIF) and numerical simulations.

A time-dependent, spatially one-dimensional fluid-Poisson model has been applied to analyse the impact of small amounts of tetramethylsilane (TMS) on the discharge characteristics of an atmospheric-pressure dielectric barrier discharge (DBD) in argon. Based on an established argon kinetics, it includes a reaction kinetics for TMS, which has been validated by measurements of the ignition voltage at the frequency f = 86.2 kHz for TMS amounts of up to 200 ppm.

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H6 (ethane) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H4 (ethylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H2 (acetylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

The dataset includes all the input and output files for the paper: Comparison of six simulation codes for positive streamers in air (https://doi.org/10.1088/1361-6595/aad768). Three test cases for axisymmetric positive streamers are described in the paper. The codes are of the finite volume or the finite element type, and they use both explicit and implicit time stepping. The computational domain and initial conditions are kept simple, so other codes can be compared relatively easily to the data published here.